The new generation MOCVD in-situ monitoring equipment from AK Optics, is suitable for various MOCVD in-situ monitoring applications such as LEDs, power devices, optoelectronic devices, and SiC epitaxy etc.

The VRT940B Temperature & Reflectivity Meter features a fiber-optic connected RT probe for temperature and reflectivity measurement. It offers a single wavelength of 940nm, a customizable temperature measurement range, and a Trigger signal input function—enabling wafer-by-wafer measurement for multi-wafer systems. With a compact design for easy installation and operation, it is used for temperature monitoring in SiC epitaxy equipment, where the temperature signal can be applied to temperature control.

• Customizable temperature measurement range.
• Features a Trigger signal input for wafer-specific measurement in multi-wafer systems.
• Compact size for easy installation and use.

The Cal-1 Broad-Spectrum Temperature Calibration Light Source features a high-stability tungsten halogen light source, with a radiation wavelength of 350-2600nm. It offers high light intensity stability, a long-lifetime bulb (equipped with a bulb operating hour timer), and comes with a power adapter and lithium battery. It is suitable for use inside or outside a nitrogen box environment.

• Broad-spectrum light source with a radiation wavelength of 350-2600 nm, suitable for a wide range of applications.
• High stability of light intensity and a long-life bulb, equipped with a bulb hour meter to track usage time.
• Includes both a power adapter and a lithium battery, enabling operation in environments with or without a nitrogen room.

The Cal-2 High-Precision Temperature Calibration Unit is equipped with an integrated 24-bit high-precision temperature measurement probe, featuring a 4mm diameter detection aperture. It is suitable for various viewports, with excellent repeatability, high stability. It is compact, easy installation and operation.

• Integrated 24-bit high-precision temperature measurement probe.
• A 4mm diameter detection aperture, compatible with various viewports.
• Excellent repeatability, high stability, compact size, and easy installation and use.

• Measurement Wavelength: 405 nm
• Temperature Range: 650°C to 1300°C
• Can be used in conjunction with AK optics viperRTC equipment to achieve emissivity-corrected 405nm temperature monitoring

The Scanpyro temperature scanning system is designed for MOCVD chambers with slit-type viewports to scan the temperature distribution across the entire graphite susceptor and the wafers on it.

• Equipped with an automated translation stage that scans the entire susceptor surface during the monitoring process.
• The acquired data can be used to analyze temperature distribution, providing a reliable basis for adjusting chamber heating and improving temperature uniformity.
• Features a graphical display interface for ease of use.
• Can be customized to suit specific user chamber configurations.

The EM-940 graphite susceptor emissivity meter measures surface emissivity to enable accurate temperature measurement

• Supports integration with ScanPyro
• Measures emissivity distribution across the full graphite susceptor
• Detects graphite susceptor anomalies