Falcon Series
Falcon Series
LED Industry Wafer Defect Inspection
The Falcon Series covers optical inspection across all sapphire production process nodes. Products include sapphire surface defect inspection (with 300nm sensitivity), PSS patterned substrate inspection, GaN/GaAs epitaxy wafer inspection, as well as chip inspection tool such as COW, COT, COTD(both-side inspection)
  • Focused on all sapphire process nodes
  • Wide applicability & high cost-effectiveness
  • Multi-inspection, multi-scale modes; a comprehensive sapphire inspection tool