IR Temperature Measurement AK-Pyro Series

VT940B/VT1550B

Multi-Channel Fiber-Optic Pyrometer

An optical fiber pyrometer designed for semiconductor equipment, applicable for SiC epitaxy, silicon epitaxy, MOCVD topliner temperature measurement etc

Versatile and cost-effective, configurable with 1 to 4 channels
Multiple wavelength options available: 0.9 μm, 1.55 μm, 1.8 μm, 2.4 μm
Different wavelengths can be mixed and matched within a single unit to enable multi-wavelength temperature measurement.

LT1550

Light-pipe Pyrometer

The Light-pipe Pyrometer, featuring a sapphire light-pipe sensor, can penetrate deep into the interior of process reaction chambers to accurately measure the temperature of susceptors. It is suitable for temperature measurement applications in MOCVD and other semiconductor equipment for temperature control.

The light-pipe sensor is connected to the pyrometer module via an optical fiber
High measurement precision with a repeatability of ±0.1°C
Wide temperature measurement range from 100°C to 1800°C
Rich selection of interfaces, including Ethernet, serial, and analog, for ease of use

LRT920

Emissivity Meter

The sapphire light-pipe probe, connected via optical fiber, is used for real-time emissivity measurement of silicon wafers in RTP rapid thermal annealing equipment

The probe is connected to the measurement unit via an optical fiber.
The probe can be customized according to equipment requirements.
Rich selection of interfaces for ease of use.

T3300/T5200

Mid-Infrared pyrometer

Operating at 3.3 μm and 5.2 μm, these infrared pyrometers are ideal for semiconductor, glass, and solar cell processing. Their key advantage in lamp-heated epitaxy tools is the rejection of the lamp spectrum, which avoids stray light interference and provides accurate epi-wafer temperature data for precise process control

High temperature measurement precision with a repeatability of ±0.1°C
Fast measurement speed, with a minimum response time of 4ms
Comprehensive interfaces: Ethernet, serial port, and analog output
Configurable alarm function

AK-mPyro Series

Compact-Size Pyrometer AK-mPyro Series

These compact, multi-wavelength pyrometers are designed for versatile temperature measurement, making them ideal for use in epitaxy, RTA, MBE, and ion implantation equipment.

Compact size allows for installation in confined spaces and facilitates multi-probe applications
High precision with a repeatability of ±0.1°C
Rich selection of interfaces, with a customizable EtherCAT option for direct integration into equipment control networks